STUDY OF MECHANICAL PROPERTIES OF NANOSTRUCTURED POLYMER COATINGS PREPARED USING PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

1 BURŠÍKOVÁ Vilma
Co-authors:
1 HOMOLA Vojtěch 2 PEŘINA Vratislav
Institutions:
1 Faculty of Science, Masaryk University, Kotlářská 2, 61137 Brno, Czech Republic, vilmab@physics.muni.cz
2 Nuclear Physics Institute, Academy of Sciences of the Czech Republic, 5068 Rež near Prague, Czech Republic
Conference:
7th International Conference on Nanomaterials - Research & Application, Hotel Voronez I, Brno, Czech Republic, EU, October 14th - 16th 2015
Proceedings:
Proceedings 7th International Conference on Nanomaterials - Research & Application
Pages:
105-110
ISBN:
978-80-87294-59-8
ISSN:
2694-930X
Published:
11th January 2016
Proceedings of the conference were published in Web of Science and Scopus.
Metrics:
20 views / 8 downloads
Abstract

The aim of the present work was to deposit transparent polymer SiOxCyHz protective coatings from hexamethyldisiloxane/oxygen mixtures in capacitively coupled glow discharge. The coatings prepared under dusty plasma conditions showed nanocomposite character. Complex characterization of the local mechanical properties was carried out on the prepared samples from nano to microscale using indentation techniques. The coatings were very elastic, they exhibited high elastic recovery and low plastic deformation even at indentation depths approaching the coating thickness.

Keywords: PECVD, hexamethyldisiloxane, mechanical properties, nanoDMA
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