The aim of the present work was to deposit transparent polymer SiOxCyHz protective coatings from hexamethyldisiloxane/oxygen mixtures in capacitively coupled glow discharge. The coatings prepared under dusty plasma conditions showed nanocomposite character. Complex characterization of the local mechanical properties was carried out on the prepared samples from nano to microscale using indentation techniques. The coatings were very elastic, they exhibited high elastic recovery and low plastic deformation even at indentation depths approaching the coating thickness.Keywords: PECVD, hexamethyldisiloxane, mechanical properties, nanoDMA
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