It is well known that carbon-based materials have large variance in hardness. There are several methods for modifying the properties and improving the hardness of carbon-based layers. We applied ion beam assisted deposition for preparing a-C:N nanolayers on Ti6Al4V alloy. A Hysitron TI 950 TriboIndenter™ nanomechanical test instrument was used to assess the depth profiles of the mechanical properties on modified titanium substrates. Two methods were employed in the measurements: a) quasistatic partial unload, and b) dynamic Continuous Measurement of X (CMX). We obtained comparable results from both methods. The average nanoindentation hardness increased from HIT ~ 5GPa for a reference sample to HIT ~ 8.6 GPa for a sample coated by an a-C nanolayer, and to HIT ~ 11.5 GPa for a sample coated by an a-C:N nanolayer. The average storage modulus of the sample coated by a-C:N increased from E´~130 GPa (reference sample) to E´~155 GPa. The storage modulus of the sample coated by the a-C nanolayer was less than the storage modulus of the titanium substrate.Keywords: Nanolayer, Nanohardness, Nanoindentation
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