In this work, composite layers of hexamethyldisilazane (HMDSN) and lactic acid (LA) were prepared using chemical vapor deposition process by a nitrogen atmospheric pressure plasma jet source. The HMDSN vapours were introduced into the plasma jet. Varying LA admixture was added into the jet in the form of aerosol.The chemical composition, morphology and wettability of resulting films were studied. Infrared spectra and XPS analysis show both SiO like and hydrocarbon structures. With increasing amount of LA admixture, the oxidation of the layers increases. The morphology of the films was measured with SEM. The films prepared with no LA have a foam-like structure. With increasing amount of LA the structure changes into more fractal-like. The Xray diffraction analysis suggests the presence of amorphous SiO2 domains in the films. The films exhibited superhydrophobic properties that can be modified by the posttreatment of the samples in DBD discharge.Keywords: lactic acid, hexamethyldisilazane, atmospheric plasma jet
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