This study addresses the effects of atmospheric-pressure plasma on the properties of methylammonium lead halide perovskite thin films. Plasma-treated films then were used to fabricate an inverted p-i-n perovskite solar cell. The plasma treatment employed a large-area plasma of extremely high-volume power density, up to 100 W/cm3, capable of generating diffuse, homogeneous and cool plasma (<70 °C) in ambient air, as well as in other technical-grade gases including nitrogen, argon, methane, hydrogen, carbon dioxide and pure water vapour. Although the temperature of the plasma remained very low, the population of energetic states proved sufficient to induce both physical and chemical changes on the surfaces of perovskite films. The results demonstrate that plasma treatment leads to perovskite films with homogeneous surfaces. Photoluminescence measurement revealed that plasma treatment enhanced the intensity of peaks, a property that may be attributed to improved crystallinity. Most importantly, plasma treatment of perovskite films improved the performance of the perovskite solar cells.Keywords: Low-temperature plasma, plasma treatment, DCSBD, methylammonium halide, perovskite solar cell
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