Present work is dedicated to the development of lithium-nickel oxide film – positive electrode for solid-state lithium-ion batteries. The formation of electrochemical phase was performed by а two-step process. At first lithium-nickel oxide film was deposited by Atomic Layer Deposition on stainless steel 316SS and silicon wafer at 300 °C. One “supercycle” of lithium-nickel oxide film consisted of n (5 or 10) cycles of nickel oxide structures (NiOx) deposition, followed by one cycle of lithium oxide (LiOx) structures deposition. Bis(cyclopentadienyl)nickel(II) (NiCp2) and Lithium bis(trimethylsilyl)amide (LiHMDS) were used as metal precursors. Oxygen remote plasma was applied as a counter-reagent (oxidizer). The thickness of deposited films was 58.2 nm (n=10, 250 supercycles) and 74.3 nm (n=5, 500 supercycles). At the second step, the obtained films were annealed in an air atmosphere at different temperatures 400-800 °C for 10-15 minutes. Spectral ellipsometry, small-angle X-ray scattering, X-ray diffraction were used to characterize obtained films. The electrochemical performance was studied with the use of Cyclic Voltammetry and Galvanostatic cycling. The discharge capacity augmented with an increase of a fraction of NiOx structures and annealing temperature. The highest capacity (23 µAh·µm-1·cm-2, at 7.4C rate) was observed for sample calcined at 800 °C (n=10, 250 supercycles).Keywords: Solid-state lithium-ion batteries, positive electrode, atomic layer deposition, lithium-nickel oxide
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