Scanning electron microscopy was used to determine physical properties of microwave plasma synthesized graphene nanosheets such as size and shape under various electron beam parameters (accelerating voltage, electron beam current, working distance). The stability and amount of defects of graphene nanosheets structure was investigated in dependence on these parameters and the results were compared to data obtained by TEM and Dynamic light scattering (DLS). Electron beam irradiation lead to change of nanosheets topography and defect formation was observed as well. The amorphization of the carbon nanostructure led to increase of intensity of D band (1360 cm-1) in Raman spectra. Contrary to electron beam irradiation damage the high temperature annealing, up to 800 °C, in Ar led to no observable changes.Keywords: Graphene, electron microscopy, irradiation, structure
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