LITESCOPE™ AFM-IN-SEM: ADVANCED TOOL FOR CORRELATIVE IMAGING AND SURFACE CHARACTERIZATION

1 NEUMAN Jan
Co-authors:
1 NOVACEK Zdenek 1 NOVOTNA Veronika 1 HEGROVA Veronika 2 FLAJSMAN Lukas
Institutions:
1 NenoVision s.r.o, Brno, Czech Republic, EU, application@nenovision.com
2 Central European Institute of Technology (CEITEC), Brno, Czech Republic, EU, Lukas.Flajsman@ceitec.vutbr.cz
Conference:
11th International Conference on Nanomaterials - Research & Application, Hotel Voronez I, Brno, Czech Republic, EU, October 16th - 18th 2019
Proceedings:
Proceedings 11th International Conference on Nanomaterials - Research & Application
Pages:
568-572
ISBN:
978-80-87294-95-6
ISSN:
2694-930X
Published:
1st April 2020
Proceedings of the conference have been sent to Web of Science and Scopus for evaluation and potential indexing.
Metrics:
38 views / 15 downloads
Abstract

Atomic force microscope (AFM) LiteScope™ produced by NenoVision is carefully designed for direct integration into many different types of scanning electron microscopes (SEM). It is equipped with unique technology for true correlative imaging – Correlative Probe and Electron Microscopy™ (CPEM). It allows simultaneous measurement of various signals of SEM, AFM and other related techniques like Electron Beam Induced Current (EBIC) or Catodoluminiscence (CL). LiteScope also enables using other methods such as Focused Ion Beam (FIB), Gas Injection System (GIS) or Electron Dispersive X-ray (EDX) to modify and right away analyze the sample surface. Among the main applications belong e.g. 3D surface characterization, height/depth profiling, surface roughness calculation, precise tip navigation, nanoindentation and nanomanipulation, variety of spectroscopic regimes, measurement of electrical and mechanical sample properties, etc.

Keywords: Correlative Probe and Electron Microscopy (CPEM), Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM), Focused Ion Beam (FIB)
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