STUDY OF NANOSTRUCTURED PLASMA-POLYMER THIN FILMS GROWTH UNDER DUSTY PLASMA CONDITIONS

1 HOMOLA Vojtěch
Co-authors:
1 Přibyl Roman 1 KELAROVÁ Štěpánka 1 Václavík Richard 1 Tomšej Petr 1 Stupavská Monika 1 Zábranský Lukáš 2 Charvatova Campbell Anna 2 Klapetek Petr 1 BURŠÍKOVÁ Vilma
Institutions:
1 Faculty of Science, Masaryk University, Kotlářská 2, 61137 Brno, Czech Republic, vilmab@physics.muni.cz
2 Czech Metrologic Institute, Okruzni 31, 63800 Brno, Czech Republic
Conference:
11th International Conference on Nanomaterials - Research & Application, Hotel Voronez I, Brno, Czech Republic, EU, October 16th - 18th 2019
Proceedings:
Proceedings 11th International Conference on Nanomaterials - Research & Application
Pages:
642-647
ISBN:
978-80-87294-95-6
ISSN:
2694-930X
Published:
1st April 2020
Proceedings of the conference have been sent to Web of Science and Scopus for evaluation and potential indexing.
Metrics:
61 views / 20 downloads
Abstract

In the present work plasma-polymer nanocomposite thin films were prepared under dusty plasma conditions in capacitively coupled RF discharges. The main focus was on the study of the formation of the organosilicon plasma polymers and their growth. The plasma polymers were grown heterogeneously in form of polymeric particles arising from the discharge volume which incorporated into the amorphous organosilicon polymeric film growing on the silicon and glass substrates. The created nanocomposite structure had very beneficial influence on the film properties. The films showed very interesting mechanical and surface properties. Variation in deposition conditions enabled us to vary the surface free energy of the films. The mechanical properties of the films were studied using nanoindentation technique and the surface structure was studied using atomic force microscopy. The atomic composition and chemical structure of the films were studied studied using XPS and FTIR techniques. The surface free energy of the films was studied using contact angle measuring techniques.

Keywords: PECVD, hexamethyldisiloxane, oxygen, mechanical properties, AFM, surface free energy
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