VERIFICATION OF NANOINDENTATION DEVICES USING ATOMIC FORCE MICROSCOPY

1 CHARVÁTOVÁ CAMPBELL Anna
Co-authors:
1,2 HAVLÍČEK Marek 1,2 KLAPETEK Petr 3 BURŠÍKOVÁ Vilma
Institutions:
1 Czech Metrology Institute, Brno, Czech Republic, EU, acampbellova@cmi.cz
2 Central European Institute of Technology, Brno, Czech Republic, EU
3 Faculty of Science, Masaryk University, Brno, Czech Republic, EU
Conference:
11th International Conference on Nanomaterials - Research & Application, Hotel Voronez I, Brno, Czech Republic, EU, October 16th - 18th 2019
Proceedings:
Proceedings 11th International Conference on Nanomaterials - Research & Application
Pages:
698-703
ISBN:
978-80-87294-95-6
ISSN:
2694-930X
Published:
1st April 2020
Proceedings of the conference have been sent to Web of Science and Scopus for evaluation and potential indexing.
Metrics:
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Abstract

Nanoindentation has become a popular tool for the exploration of mechanical properties of materials at the nanoscale. However, calibration and traceability issues are often neglected, making the direct comparison of results between different instruments difficult. The direct calibration of the sensors is challenging and requires dedicated instruments leaving indirect calibration as the only option to ordinary users. However, indirect calibration compares only the resulting hardness or modulus of the reference sample and the measured sample. Therefore, it cannot distinguish the source of errors, such as errors in the depth and load sensors, errors in the reference sample properties, contamination of the tip or sample, wear of tip and others.In this contribution we explore the possibility of using measurements of indents by atomic force microscopy for the verification of the depth sensor. Measurements for different nanoindentation devices are presented and compared with a focus on the uncertainties of the method.

Keywords: Nanoindentation, depth sensor, calibration, AFM
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