STUDY OF MECHANICAL PROPERTIES OF NANOLAYERED TI/NI COATINGS

1 ZÁBRANSKÝ Lukáš
Co-authors:
1 VÁCLAVÍK Richard 1 PŘIBYL Roman 1 ŽENÍŠEK Jaroslav 1 SOUČEK Pavel 2 BURŠÍK Jiří 3 FOŘT Tomáš 1 BURŠÍKOVÁ Vilma
Institutions:
1 Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlářská 2, 61137 Brno, Czech Republic
2 Institute of Physics of Materials, Academy of Sciences of the Czech Republic, Žižkova 22, 61662 Brno, Czech Republic
3 Institute of Scientific Instruments, Czech Academy of Sciences, Královopolská 147, CZ-612 64 Brno, Czech Republic
Conference:
9th International Conference on Nanomaterials - Research & Application, Hotel Voronez I, Brno, Czech Republic, EU, October 18th - 20th 2017
Proceedings:
Proceedings 9th International Conference on Nanomaterials - Research & Application
Pages:
836-841
ISBN:
978-80-87294-81-9
ISSN:
2694-930X
Published:
8th March 2018
Proceedings of the conference were published in Web of Science and Scopus.
Metrics:
13 views / 4 downloads
Abstract

The aim of the present work was to study the dependence of mechanical properties of Ti/Ni multilayer thin films on the thicknesses of constituent Ti and Ni layers. The multilayer thin films were synthesized by deposition of Ti and Ni layers alternately on single crystalline silicon substrates using direct current magnetron sputtering method. Thicknesses of Ti and Ni layers varied from 1.7 nm to 100 nm. The micro-structure of the multilayer films was studied using X-ray diffraction technique, scanning electron microscopy with focused ion beam technique and transmission electron microscopy. Mechanical properties obtained from nanoindentation experiments were discussed in relation to microstructural observations.

Keywords: Ti/Ni, multilayers, magnetron sputtering, nanoindentation, TEM
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