Titanium materials are widely used in aerospace industry, in chemical industry and in total joint replacements because of their low density, high strength, good corrosion resistance, high toughness, and good biocompatibility. However, titanium materials have poor wear resistance and high friction. Implantation of nitrogen into titanium and its alloys significantly improves their surface properties such as hardness, friction, wear and corrosion resistance. Titanium nitride nanolayer was prepared by nitrogen ion implantation on titanium. The evolution of phase composition after annealing was investigated. The samples were analysed by X-ray diffraction, X-ray photoelectron spectroscopy and nanoindentation. The aim of this work is to examine the effect of the nitrogen concentration on phase representation in the modified surface area and the structural mechanisms of hardening after annealing.Keywords: Ion implantation, Annealing, Structure, Phase composition
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