Nitrogen implantation into titanium and its alloys significantly improves their surface hardness, sliding behaviour, wear and corrosion resistance. A thin surface nanolayer originating, e.g., from air exposure or from condensation of oil vapours modifies the ion energy distribution and causes a difference in the ion range. The effect of the thickness of the contaminant carbon layer on the nitrogen distribution was investigated. Titanium samples with a carbon nanolayer were implanted with nitrogen ions. An almost Gaussian experimental concentration profile was observed. The maximum of nitrogen concentration moves into the specimen with increasing thickness of the nanolayer. The experimental findings are in agreement with the theoretical calculations. These results can be useful for optimizing surface modifications of titanium materials by ion implantation.Keywords: ion implantation, concentration profile, surface nanolayer
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