ROLL-TO-ROLL SURFACE ETCHING OF POLYMERS USING HYDROGEN PLASMA AT ATMOSPHERIC PRESSURE

1 KRUMPOLEC Richard
Co-authors:
1 ZEMÁNEK Miroslav 1 TUČEKOVÁ Zlata 1 KELAR Jakub
Institution:
1 R&D Center for Low-Cost Plasma and Nanotechnology Surface Modifications (CEPLANT), Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlářská 267/2, 611 37, Brno, Czech Republic, EU
Conference:
9th International Conference on Nanomaterials - Research & Application, Hotel Voronez I, Brno, Czech Republic, EU, October 18th - 20th 2017
Proceedings:
Proceedings 9th International Conference on Nanomaterials - Research & Application
Pages:
283-288
ISBN:
978-80-87294-81-9
ISSN:
2694-930X
Published:
8th March 2018
Proceedings of the conference were published in Web of Science and Scopus.
Metrics:
17 views / 13 downloads
Abstract

This paper reports on plasma surface etching of three different polymers using a low-temperature (80°C) atmospheric-pressure plasma generated in pure hydrogen by a diffuse coplanar surface barrier discharge. Flexible polymer foils were plasma-modified in roll-to-roll configuration. Three polymers, polyethylene naphthalate (PEN), polyethylene terephthalate (PET), and polyimide (PI) foils were exhibited to the hydrogen plasma etching. Scanning electron microscopy was used to determine the change in the thickness of the samples from the measurement of cross-section images of polymer foils. As shown, the etching rate of tested samples was of the order of ~10–100 nm.min-1. Therefore, the presented method is suitable for precise etching of nanostructures and thin polymer film or flexible polymer substrates.

Keywords: plasma etching, DCSBD, hydrogen, polymers, atmospheric pressure
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