Gas and migration barrier coatings which are flexible and transparent can be generated on polymer films by combining Combustion Chemical Vapor Deposition (CCVD) and Sol-Gel Technology.The CCVD (especially the Pyrosil® method) allows the formation of highly compact oxide layers based on siloxanes under atmospheric pressure. In order to make them more flexible and to reduce the permeability, the use of the Sol-Gel technique is suitable. In this case, hybrid Si and / or Al oxide layers with an inorganic and an organic network can be deposited.The Oxygen Transmission Rate (OTR) and the Water Vapor Transmission Rate (WVTR) are mainly used as an indicator for gas barrier effect (GBE). GBE can be significantly improved by synergistic combination of different coating techniques wherein stacked layer systems are formed.These systems are only a few hundred nm thick. Hence, they appear optically transparent. This property is very important for usability in the packaging and electronics industry. Topography of the layers was investigated by AFM. Chemical composition was studied by FTIR and layer thicknesses were determined by Profilometry and/or Ellipsometry.Furthermore, the overall permeability to certain permeates can be adjusted by the property of each single layer. This allows the generation of semipermeable membranes and therefore the use in filtration technology.Keywords: Chemical Vapor Deposition, Sol-Gel Technology, barrier coatings, packaging, filtration
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