EFFECT OF HEAT TREATMENT ON THE PROPERTIES OF SOL-GEL DEPOSITED ZNO SEED LAYERS

1 BAŠINOVÁ Nikola
Co-authors:
1 ČERNOHORSKÝ Ondřej 1 GRYM Jan 2 MAIXNER Jaroslav
Institutions:
1 Institute of Photonics and Electronics of the CAS, Chaberská 57, 18251, Prague, Czech Republic, EU, basinova@ufe.cz
2 University of Chemistry and Technology Prague, Technická 5, 16628, Prague, Czech Republic, EU
Conference:
9th International Conference on Nanomaterials - Research & Application, Hotel Voronez I, Brno, Czech Republic, EU, October 18th - 20th 2017
Proceedings:
Proceedings 9th International Conference on Nanomaterials - Research & Application
Pages:
128-133
ISBN:
978-80-87294-81-9
ISSN:
2694-930X
Published:
8th March 2018
Proceedings of the conference were published in Web of Science and Scopus.
Metrics:
28 views / 17 downloads
Abstract

Zinc oxide nanorods as a potential material for nanoscale devices are prepared by chemical bath deposition (CBD). The effect of the quality of the sol-gel deposited seed layer on the vertical alignment of the nanorods to a silicon substrate is discussed. Emphasis is put on the investigation of the impact of the heat treatment on the properties of the seed layer deposited by dip-coating. The sol-gel method is a multi-stage process consisting of three principal steps: (i) preparation of a solution with suitable precursors, (ii) deposition of the precursor solution, and (iii) the heat treatment. The preheating needs to be performed to thermally decompose the zinc acetate precursor into zinc oxide seeds. Three different temperatures of preheating are compared (300 °C, 350 °C, 400 °C) followed by annealing in argon at 800 °C and the influence on the quality of the seed layers and vertical alignment of nanorods are discussed. When the preheating temperature is higher than 350 °C, the seed layer comprises smaller and denser crystallites with a preferential orientation along the c-axis. CBD growth of ZnO nanorods on these seed layers results in their good vertical alignment.

Keywords: ZnO nanorods, sol-gel, seed layer, heat-treatment, chemical bath deposition
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