THE INTRINSIC SUBMICRON ZNO THIN FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING

1,2 REMES Zdenek
Co-authors:
1 STUCHLIK Jiri 1 PURKRT Adam 1,2 CHANG Yu-Ying 1 JIRASEK Vit 1 STENCLOVA Pavla 3 PRAJZLER Vaclav 4 NEKVINDOVA Pavla
Institutions:
1 Institute of Physics Institute of Physics CAS, Prague, Czech Republic, EU, remes@fzu.cz
2 Faculty of Biomedical Engineering CTU in Prague, Kladno, Czech Republic, EU
3 Faculty of Electrical Engineering CTU in Prague, Prague, Czech Republic, EU
4 Department of Inorganic Chemistry UCT, Prague, Czech Republic, EU
Conference:
8th International Conference on Nanomaterials - Research & Application, Hotel Voronez I, Brno, Czech Republic, EU, October 19th - 21st 2016
Proceedings:
Proceedings 8th International Conference on Nanomaterials - Research & Application
Pages:
36-41
ISBN:
978-80-87294-71-0
ISSN:
2694-930X
Published:
17th March 2017
Proceedings of the conference were published in Web of Science and Scopus.
Metrics:
30 views / 23 downloads
Abstract

The DC reactive magnetron sputtering of metallic target in oxide atmosphere is a simple method of depositing the undoped (intrinsic (undoped)) nanopolycrystalline layers of metal oxides. We have optimized the deposition of the intrinsic ZnO zinc oxide (ZnO) thin films with submicron thickness 50−500 nm on fused silica glass substrates and investigated the localized defect states below the optical absorption edge down to 0,01 % using photothermal deflection spectroscopy (PDS) in a broad spectral range from UV to IR. We have shown that the defect density, the optical absorptance and the related optical attenuation in planar waveguides can be significantly reduced by annealing in air at 400 °C.

Keywords: ZnO; reactive magnetron sputtering; plasma treatment; photothermal deflection spectroscopy; optical spectroscopy
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