from the conferences organized by TANGER Ltd.
The DC reactive magnetron sputtering of metallic target in oxide atmosphere is a simple method of depositing the undoped (intrinsic (undoped)) nanopolycrystalline layers of metal oxides. We have optimized the deposition of the intrinsic ZnO zinc oxide (ZnO) thin films with submicron thickness 50−500 nm on fused silica glass substrates and investigated the localized defect states below the optical absorption edge down to 0,01 % using photothermal deflection spectroscopy (PDS) in a broad spectral range from UV to IR. We have shown that the defect density, the optical absorptance and the related optical attenuation in planar waveguides can be significantly reduced by annealing in air at 400 °C.
Keywords: ZnO; reactive magnetron sputtering; plasma treatment; photothermal deflection spectroscopy; optical spectroscopy© This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.