New materials with high possible figure of merit ZT are of high interest as a promising candidates for thermoelectric applications such as energy harvesting. Miniaturization of such systems tends toward developing of the suitable characterization method with nanometer resolution ability. In our contribution, we present the development and experimental results of a simple scanning probe microscopy method for the relative thermal conductivity characterization. The possibility of the setup is demonstrated on the set of different thin thermoelectric layers grown from hot pressed targets by pulsed laser deposition on the reference Si substrate. All the measurements were performed on the commercial Veeco Multimode scanning AFM/STM microscope with home developed controller and by using PicoCal Inc. bolometer probes with tungsten resistive path. All the experiments were done in the air at the ambient condition. Additional sample treatment for the measurement will be also briefly describedKeywords: scanning thermal microscopy, figure of merit, thermoeletric materials
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