SELF-ORGANIZED TIO2 NANOTUBE ARRAYS AND THE MECHANISM OF TUBE GROWTH

1,2 PŘIKRYLOVÁ Kateřina
Co-authors:
1,2 DRBOHLAVOVÁ Jana 1,2 PYTLÍČEK Zdeněk 1,2 SVATOŠ Vojtěch 1,2 HUBÁLEK Jaromír
Institutions:
1 Department of Microelectronics, Faculty of Electrical Engineering and Communication, Brno University of Technology, Technická 3058/10, 616 00 Brno, Czech Republic
2 Central European Institute of Technology, Brno University of Technology, Technická 3058/10, 616 00 Brno, Czech Republic, Katerina.Prikrylova@ceitec.vutbr.cz
Conference:
7th International Conference on Nanomaterials - Research & Application, Hotel Voronez I, Brno, Czech Republic, EU, October 14th - 16th 2015
Proceedings:
Proceedings 7th International Conference on Nanomaterials - Research & Application
Pages:
260-264
ISBN:
978-80-87294-59-8
ISSN:
2694-930X
Published:
11th January 2016
Proceedings of the conference were published in Web of Science and Scopus.
Metrics:
19 views / 5 downloads
Abstract

TiO2 nanotubes are highly promising for application in various fields. Many publications are concerned with nanotubes prepared by the anodization of titanium foil. This work presents TiO2 nanotube arrays fabricated by the anodic oxidation of thin titanium layer. Titanium layer is sputter-deposited on silicon wafer with thermal SiO2 layer. Nanotubes were prepared in organic electrolyte containing water and different amounts of ammonium fluoride. The influence of different amount of ammonium fluoride is observed by scanning electron microscopy (SEM). Removing initial oxide barrier layer plays a significant role in successful preparation of nanotubes. Under optimized conditions, i.e. a good balance between oxidation and etching during anodization, nanotube arrays with uniform configuration are obtained.

Keywords: Titanium dioxide, nanotubes, growth mechanism, anodic oxidation
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