TiO2 nanotubes are highly promising for application in various fields. Many publications are concerned with nanotubes prepared by the anodization of titanium foil. This work presents TiO2 nanotube arrays fabricated by the anodic oxidation of thin titanium layer. Titanium layer is sputter-deposited on silicon wafer with thermal SiO2 layer. Nanotubes were prepared in organic electrolyte containing water and different amounts of ammonium fluoride. The influence of different amount of ammonium fluoride is observed by scanning electron microscopy (SEM). Removing initial oxide barrier layer plays a significant role in successful preparation of nanotubes. Under optimized conditions, i.e. a good balance between oxidation and etching during anodization, nanotube arrays with uniform configuration are obtained.Keywords: Titanium dioxide, nanotubes, growth mechanism, anodic oxidation
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