SILVER MICRO DROP STRUCTURED TWICE AROUND THE EARTH

1 MELUZÍN Petr
Co-authors:
2 TRYHUK Václav 1 HORÁČEK Miroslav 1 KNÁPEK Alexandr 1 KRÁTKÝ Stanislav 1 MATĚJKA Milan 1 KOLAŘÍK Vladimír
Institutions:
1 Institute of Scientific Instruments CAS, v. v. i., Brno, Czech Republic, EU, vladimir.kolarik@isibrno.cz
2 Brno Technical University, Faculty of Civil Engineering, Institute of Mathematics and Descriptive Geometry, Czech Republic, EU
Conference:
27th International Conference on Metallurgy and Materials, Hotel Voronez I, Brno, Czech Republic, EU, May 23rd - 25th 2018
Proceedings:
Proceedings 27th International Conference on Metallurgy and Materials
Pages:
1175-1180
ISBN:
978-80-87294-84-0
ISSN:
2694-9296
Published:
24th October 2018
Proceedings of the conference were published in Web of Science and Scopus.
Metrics:
13 views / 3 downloads
Abstract

Planar micro structuring of thin metallic layers allows to achieve required surface properties of metallic layers covering bulk materials. Recently, the arrangement of micro holes or pillars placed around the primary spiral according to a phyllotactic model was presented. This deterministically aperiodic planar arrangement was used for benchmarking purposes of the e–beam writer patterning. This arrangement based on single primary spiral and a variety of derived secondary spirals has several interesting properties. One of them is a very low ratio between the area populated by individual micro elements and the length of the primary phyllotactic spiral. This paper presents analysis of the phyllotactic spiral length and the rising gradient at the spiral outer edge. The practical part of the presented work deals with the patterning of a thin silver layer deposited on the silicon or glass substrates using e-beam pattern generation, lithography techniques and related technologies. An interesting impact of the mentioned spiral properties on the e–beam writing strategies and the exposure ordering strategy are also discussed.

Keywords: Metallic thin layer, planar surface structure, phyllotactic spiral, e-beam writer
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