Nanoindentation methods used for evaluation surface layers are static indentation and scratch indentation too. Static indentation methods are used namely for evaluation hardness characteristics and for evaluation elastic deformation and plastic deformation of surface layers too based on measurement indentation curves – dependence depth indentation and normal force during all indentation process during loading and unloading. Cyclic and step by step indentation modes give possibilities to evaluate much more information about resistivity of surface layers to the indentation stress. Scratch indentation methods are used for evaluation namely adhesive cohesive properties and behaviour of surface layers with very small thickness or/and thin films with very low resistivity of thin films and low hardness. The surface layering is created by technology process of creation of thin films and surface treatment process or by initiation and evolution of degradation process and ageing process. The initiation of degradation and ageing are evaluated in the starting stadium and in the next with step by step sensitive analysis of changing properties and behaviour. From this point of view static nanoindentation and scratch nanoindentation are very useful for analysis step by step changing of mechanical properties and behaviour with high sensitivity and depth resolution too. The paper presented utilization of nanoindentation static and scratch nanoindentation too for very different application in surface treatment but for evaluation of degradation and ageing process too.Keywords: Nanoindentation, scratch nanoindentation, radiation ageing, temperature ageing, degradation of material, thin films, surface treatment
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