DEVELOPMENT OF THE BULGE TEST EQUIPMENT FOR MEASURING MECHANICAL PROPERTIES OF THIN FILMS

1 HOLZER Jakub
Co-authors:
2 PIKÁLEK Tomáš 2 BUCHTA Zdeněk 2 LAZAR Josef 3 TINOCO Hector A. 1 CHLUPOVÁ Alice 1 KRUML Tomáš
Institutions:
1 Institute of Physics of Materials, Brno, Czech Republic, EU
2 Institute of Scientific Instruments, Brno, Czech Republic, EU
3 Universidad Autónoma de Manizales, Manizales, Colombia
Conference:
26th International Conference on Metallurgy and Materials, Hotel Voronez I, Brno, Czech Republic, EU, May 24th - 26th 2017
Proceedings:
Proceedings 26th International Conference on Metallurgy and Materials
Pages:
1053-1058
ISBN:
978-80-87294-79-6
ISSN:
2694-9296
Published:
9th January 2018
Proceedings of the conference were published in Web of Science and Scopus.
Metrics:
13 views / 8 downloads
Abstract

The bulge test apparatus designed for the measurement of mechanical material properties of thin films was constructed and tested. The principle of the test is to apply pressure on a free-standing membrane, to measure the membrane shape and to analyse the results. Commercially available silicon nitride (Si3N4) thin films were used for the testing. It is shown that interferometric set-up designed and assembled for the apparatus enables precise determination of 3D shape of the whole membrane, which allows more precise determination of materials parameters compared to measurement of the height of the center of the membrane only. Fit of an analytical formula gives values of Young modulus and residual stress with very good agreement with the literature data. Moreover, FEM model of the bulged membrane was developed. The main aim of the effort is to enable measurement of plastic properties of a thin film of interest, that will be deposited on the Si3N4 membrane with known properties and bulge test will be performed on the bilayer specimen. Subsequently, the material properties of the thin film will be obtained using FEM analysis.

Keywords: Thin films, Bulge test, Mechanical properties
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