STUDY OF DYNAMIC GAS RESPONSE OF MICROWAVE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEMS BY OPTICAL EMISSION SPECTROSCOPY

1,2 LAMBERT Nicolas
Co-authors:
1,3 MORTET Vincent
Institutions:
1 FZU - Institute of Physics of the Czech Academy of Sciences, Prague, Czech Republic, EU, mortetv@fzu.cz
2 Faculty of Electrical Engineering, Czech Technical University in Prague, Prague, Czech Republic, EU, lambert@fzu.cz
3 Faculty of Biomedical Engineering, Czech Technical University in Prague, Kladno, Czech Republic, EU, mortetv@fzu.cz
Conference:
13th International Conference on Nanomaterials - Research & Application, Orea Congress Hotel Brno, Czech Republic, EU, October 20 - 22, 2021
Proceedings:
Proceedings 13th International Conference on Nanomaterials - Research & Application
Pages:
411-416
ISBN:
978-80-88365-00-6
ISSN:
2694-930X
Published:
22nd November 2021
Proceedings of the conference were published in Scopus.
Metrics:
310 views / 159 downloads
Abstract

Microwave Plasma Enhanced Chemical Vapor Deposition (MWPECVD) is widely used for the growth and the study of synthetic doped diamond and its electronic and electrochemical applications. Recent results show the possible enhancement of dopant incorporation in diamond using pulsed gas injection in the reactor. Therefore, understanding the gas dynamic of the MWPECVD reactors is crucial to the optimization of the gas flows and diamond doping. In this work, we present a method to determine the gas dynamic response of a MWPECVD reactor. We determined the dynamic response of injected gas in a NIRIM type and a linear antenna type MWPECVD reactor by recording light emission from a hydrogen plasma during the instantaneous injection of a small fraction of nitrogen using either Optical Emission Spectroscopy (OES) or the combination of a photodiode and an optical band filter. Using linear system theory, we developed a program to determine the dynamic response of the reactor to an arbitrary shaped gas flow input from its pulse response.

Keywords: Pulse response, MWPECVD reactor, OES, gas dynamics, linear system theory

© This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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