STUDY OF CRACKS FORMATION IN HIGHLY – LOW BORON-DOPED EPITAXIAL (113) DIAMOND BILAYERS

1,2 MORTET Vincent
Co-authors:
1 KLIMSA Ladislav 1,3 LAMBERT Nicolas 1 DAVYDOVA Marina 1 KOPECEK Jaromir 1 IGNACOVA SEDLAKOVA Silvia
Institutions:
1 FZU - Institute of Physics of the Czech Academy of Sciences, Prague, Czech Republic, EU, mortetv@fzu.cz
2 Faculty of Biomedical Engineering, Czech Technical University in Prague, Kladno, Czech Republic, EU
3 Faculty of Electrical Engineering, Czech Technical University in Prague, Prague, Czech Republic, EU lambenic@fel.cvut.cz
Conference:
13th International Conference on Nanomaterials - Research & Application, Orea Congress Hotel Brno, Czech Republic, EU, October 20 - 22, 2021
Proceedings:
Proceedings 13th International Conference on Nanomaterials - Research & Application
Pages:
65-68
ISBN:
978-80-88365-00-6
ISSN:
2694-930X
Published:
22nd November 2021
Proceedings of the conference have already been published in Scopus and we are waiting for evaluation and potential indexing in Web of Science.
Metrics:
169 views / 70 downloads
Abstract

In this work, we present the study of the formation of cracks in high and low boron-doped diamond epitaxial bilayers necessary in the fabrication process of Schottky diodes. Epitaxial diamond layers were grown on (113) oriented diamond substrates by Microwave Plasma Enhanced Chemical Vapor Deposition. The effect of the thickness and the methane concentration during the growth of the undoped diamond layer on the crack formation have been studied using optical and scanning electron microscopy (SEM). We experimentally observed a critical thickness of ca. 3.5 µm above which all undoped layers are cracked. The formation of these cracks is attributed to the relaxation of the elastic energy stored in the epitaxial undoped layer due to the significant lattice mismatch (ca. 0.8 %) between the undoped and highly boron-doped diamond layers with a boron concentration of 1021 cm-3 as determined by Raman spectroscopy analysis.

Keywords: Diamond, boron-doping, epitaxy, cracks

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