GROWTH AND PROPERTIES OF DIAMOND FILMS PREPARED ON 4-INCH SUBSTRATES BY CAVITY PLASMA SYSTEMS

1,2 BABČENKO Oleg
Co-authors:
1,2 POTOCKÝ Štěpán 1 AUBRECHTOVÁ DRAGOUNOVÁ Kateřina 1 SZABÓ Ondrej 3 BERGONZO Philippe 2 REZEK Bohuslav 1 KROMKA Alexander
Institutions:
1 Institute of Physics of the Czech Academy of Sciences, Prague, Czech Republic, EU, babcenko@fzu.cz
2 Faculty of Electrical Engineering, Czech Technical University in Prague, Czech Republic, EU
3 Seki Diamond Systems, CORNES Technologies USA, San Jose, USA
Conference:
12th International Conference on Nanomaterials - Research & Application, Brno, Czech Republic, EU, October 21 - 23, 2020
Proceedings:
Proceedings 12th International Conference on Nanomaterials - Research & Application
Pages:
86-92
ISBN:
978-80-87294-98-7
ISSN:
2694-930X
Published:
28th December 2020
Proceedings of the conference were published in Web of Science and Scopus.
Metrics:
173 views / 90 downloads
Abstract

Diamond attracts the interest of researchers from different fields due to its extraordinary properties. However, many applications demand diamond films over large areas hence limiting usage of natural diamonds. Here we compare two microwave (2.45 GHz) plasma systems with ellipsoidal and multimode clamshell cavity for diamond synthesis by chemical vapor deposition. We use H2/CH4/CO2 gas mixture for diamond film deposition on Si <100> wafers. Both systems are capable of high pressure (up to 20 kPa) operation and high growth rates (several µm/h). We compare the cavity systems from the point of diamond quality (Raman shift measurement), substrate size (2” versus 4”) and grown film homogeneity together with surface morphology (SEM), deposition rate and parasitic doping levels (photoluminescence). For instance, we show that by using the multimode operation of the clamshell cavity system and specially design sample holder, it is possible to sustain a plasma in a cavity and reach good enough process reproducibility and diamond film quality over 4-inch substrates. We discuss effects of the cavity design on deposited layers for large area applications of diamond such as thermal management, electrodes and sensor arrays fabrication, photoluminescence, photonics and light sources.

Keywords: Large area diamond, microwave cavity plasma, high-power density plasma

© This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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