ORGANOSILICON PLASMA POLYMERS BASED ON TRIMETHYLSILYL ACETATE MONOMER

1 KELAROVÁ Štěpánka
Co-authors:
1 HOMOLA Vojtěch 1 BURŠÍKOVÁ Vilma
Institution:
1 Department of Physical Electronics of Masaryk University, Brno, Czech Republic, bittstep@gmail.com, vojhom@outlook.cz, vilmab@physics.muni.cz
Conference:
10th International Conference on Nanomaterials - Research & Application, Hotel Voronez I, Brno, Czech Republic, EU, October 17th - 19th 2018
Proceedings:
Proceedings 10th International Conference on Nanomaterials - Research & Application
Pages:
454-458
ISBN:
978-80-87294-89-5
ISSN:
2694-930X
Published:
28th February 2019
Proceedings of the conference were published in Web of Science and Scopus.
Metrics:
6 views
Abstract

Plasma-polymerized organosilicon coatings have been playing an important role in many research studies due to their wide range of applications. These materials can be used in industry as transparent wear resistant layers, protective hard a-Si:C:H or SiO2-like films, corrosion protection coatings, barrier films etc. Plasma-polymerization using organosilicon precursors has been investigated lately for development of unique thin film materials for bioapplications as well, including surface coating of surgical and dental implants to improve their biocompatibility. In the present work, low pressure RF capacitively coupled discharge was used to deposit thin solid films suitable for medical application from mixture of trimethylsilyl acetate (TMSA) and oxygen. Since resistance to liquid environment is the critical parameter that determines usability of the material for bioapplications, the deposited TMSA plasma polymers were exposed to water for 48 hours. The degree of stability varied with deposition parameters as well as other properties of organosilicon plasma polymers. This study summarizes changes of chemical structure and mechanical properties of resulting coatings in dependence on the ratio of TMSA and oxygen flow rates during the deposition process. Results of water stability tests included in present study proved that it is possible to prevent delamination of the coating during exposition to the aqueous environment by appropriate choice of discharge parameters.

Keywords: Plasma polymers, trimethylsilyl acetate, PECVD, FTIR, microindentation, confocal microscopy, ellipsometry
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