In recent years atomic layer deposition has proved to be a successful method of fabrication and modification of electrodes for lithium-ion batteries and thin film power sources. Tin oxide demonstrated considerable excellence over currently used materials for thin film batteries anodes, however, lithiated tin oxides are expected to show even better performance. In this research nanofilms of LiOx, SnO2 and lithiated tin oxide were deposited by atomic layer deposition (ALD) using lithium hexamethyldisilylazide (LiN[Si(CH3)2]2, LiHMDS), tetraethyl tin (Sn(C2H5)4, TET) as the metal-containing reagents and water or ozone or oxygen plasma as co-reagents. The monocrystalline silicon (100) and stainless steel (316SS) were used as supports. The thickness of the films was measured with spectral ellipsometry. The composition was studied by X-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectrometry. Regardless of the type of co-reagent, the resulting films are unstable under long-term storage in air, but their stability is significantly improved by ALD of aluminum oxide with a thickness of several nanometers. The optimal temperature range was about 250-300 °C for deposition of lithium oxide, tin oxide, and lithium-tin oxide nanofilms. It was observed the remarkable influence of the type of co-reactant on the properties of the prepared nanofilms.Keywords: Li-ion batteries, lithium oxide, anodes, lithiated tin oxide, thin film electrodes, atomic layer deposition
© This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.