THE PHOTOLUMINESCENCE AND OPTICAL ABSORPTANCE OF PLASMA HYDROGENATED NANOCRYSTALLINE ZNO THIN FILMS

1 REMES Zdenek
Co-authors:
1,2 CHANG Yu Ying 1 STUCHLIK Jiri 3 Micova Julia
Institutions:
1 Czech Academy of Sciences, Institute of Physics, Praha, Czechia, remes@fzu.cz, chang@fzu.cz, stuj@fzu.cz
2 Czech Technical University, Faculty of Biomedical Engineering, Praha, Czechia, changyuy@fbmi.cvut.cz
3 Slovak Academy of Sciences, Institute of Chemistry, Bratislava, Slovakia, chemjumi@savba.sk
Conference:
10th International Conference on Nanomaterials - Research & Application, Hotel Voronez I, Brno, Czech Republic, EU, October 17th - 19th 2018
Proceedings:
Proceedings 10th International Conference on Nanomaterials - Research & Application
Pages:
78-82
ISBN:
978-80-87294-89-5
ISSN:
2694-930X
Published:
28th February 2019
Proceedings of the conference were published in Web of Science and Scopus.
Metrics:
47 views / 27 downloads
Abstract

We have developed the technology of the deposition of the nominally undoped ZnO nanocrystalline thin films by DC reactive magnetron sputtering of Zn target in the gas mixture of argon and oxygen plasma. We have optimized the photoluminescence spectroscopy for measuring optically scattering thin layers with the high sensitivity, precise sample positioning and very low influence of the scattered excitation light. Here we present the latest results on the enhancement of the photoluminescence of the nanocrystalline ZnO thin films after plasma hydrogenation. The photoluminescence in near UV region has been enhanced whereas the deep defect related photoluminescence has been significantly decreased. We found good room temperature stability of the plasma hydrogenated ZnO nanocrystals in air, but fast degradation at elevated temperature.

Keywords: Nanomaterials, ZnO, photoluminescence, magnetron sputtering
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