from the conferences organized by TANGER Ltd. provisional website
Recently, the arrangement of diffraction primitives according to a phyllotactic model was presented. This arrangement was used to benchmarking purposes of the e–beam writer nano patterning. The phyllotactic arrangement has several interesting properties. One of them is related with the coherence between the nano– or microscopic domain of individual optical primitives and the properties of visually perceived images crated by these structures in the macro domain. This paper presents theoretical analysis of the phyllotactic arrangement in the referred context. Different approaches enabling the creation of diffractive optically variable images are proposed. The practical part of the presented work deals with the nano patterning of such structures using two different types of the e–beam pattern generators. One of them is a system with a variable shaped beam of electrons, while the other one is a system with a Gaussian–shaped beam. E–beam writing strategies and the use of inherent spiral patterns for exposure ordering and partitioning are also discussed.Keywords: Nano patterning; spiral grating structure; phyllotactic pattern; e–beam writer
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