INFLUENCE OF SUBSTRATE POLARISATION IN THE MAGNETRON SPUTTERING PROCESS (HIPIMS) ON SP3 BONDS CONTENT IN DEPOSITED DLC COATINGS

1 KOZERA Artur Albert
Co-authors:
1 SŁOMKA Zbigniew 1 KACPRZYŃSKA-GOŁACKA Joanna 2 CHODUN Rafał
Institutions:
1 Łukasiewicz Research Network—Institute for Sustainable Technologies, 6/10 Pułaskiego St., 26-600 Radom, Poland, EU artur.kozera@itee.lukasiewicz.gov.pl
2 Faculty of Materials Science and Engineering, Warsaw University of Technology, 141 Wołoska St., 02-507 Warsaw, Poland, EU
Conference:
34th International Conference on Metallurgy and Materials, Orea Congress Hotel Brno, Czech Republic, EU, May 21 - 23, 2025
Proceedings:
Proceedings 34th International Conference on Metallurgy and Materials
ISBN:
978-80-88365-27-3
ISSN:
2694-9296
Licence:
CC BY 4.0
Metrics:
24 views / 20 downloads
Abstract

DLC (Diamond-Like Carbon) coatings have found applications in various industries due to their unique mechanical properties and wear resistance, which are closely related to their structure. These coatings exhibit a high ratio of sp³ to sp² bonds among carbon atoms. In the present work, DLC coatings were deposited by High Power Impulse Magnetron Sputtering method using several different substrate polarisation values with different Ubias in the range: - 25 V, - 50 V, - 75 V, - 100 V, - 125 V. As the substrates 316L steel with a Cr-CrN coating, aimed at enhancing both the adhesion of the DLC coating and its mechanical properties, was used. In order to analyse the phase composition of DLC coatings, the Raman spectroscopy method was used. Mechanical properties were investigated by the nanoindentation method by using nanohardness tester from Anton Paar with Berkovich diamond indenter. The results of tests showed that DLC coating deposited with substrate polarisation - 50 V had the biggest content of sp3 bonds and the best mechanical properties.

Keywords: DLC, magnetron sputtering, hybridisation, sp3

© This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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