Micro mechanisms belong to innovative solutions used in many branches of industry, ranging from aviation and cosmonautics, through the automotive and medical industries. The manufacturing of micro and nanostructures requires the use of precision machining. An important role in manufacturing micro parts has electrical discharge machining (EDM). Micro – EDM is a nonconventional method of removing material, using the phenomenon of electric discharges occurring between two electrodes in the presence of a dielectric. Application in the process working electrode in the form of a thin wire (0.1 mm) allows cutting complex shape microelements. The paper presents the result of the micro wire electrical discharge machining of titanium alloy Ti-6Al-4V. Response surface methodology (RSM) was used to build empirical models of the influence of pulse time ton, wire tension WT, wire speed WS on the roughness Ra and the cut speed V during machining titanium alloy Ti-6Al-4V.Keywords: micro WEDM, cut speed, surface roughness,
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