The paper is devoted by evaluation of comparison of selected systems of thin film – basic material, which are optimized in the range of solution of the project with goal application of thin films on selected real cutting tools. There are evaluated thin films prepared by low voltage reactive arc evaporation in vacuum with different composition of ternary nitride. The evaluation of properties and behaviour is oriented on systems with thin films TiSiN, AlCrN and AlTiN. The surfaces of these systems of thin film – basic material are evaluated from point of view of verification homogeneity of thin films through of area of samples and through of geometry of selected real tools too. The distribution of thickness is evaluated by x-ray fluorescence analysis on samples and real selected places of geometry of tools too. The other comparison is realised from point of view of differences of mechanical properties and behaviour by using of indentation methods namely of nanoindentation and scratch indentation for evaluation of differences in hardness and adhesive cohesive behaviour of systems thin films – basic material.Keywords: Thin films, arc evaporation, nanoindentation, scratch test
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