OPTIMIZATION OF THE PROCESS OF DEPOSITION OF THIN ANTI-REFLECTIVE COATINGS BASED ON A LIBRARY _ DATABASE OF THE CONTROL SYSTEM IN LABVIEW

1,3 WOŹNY Krzysztof
Co-authors:
2 WINKOWSKI Paweł 3 PUTYNKOWSKI Grzegorz 4 MARSZAŁEK Konstanty
Institutions:
1 AGH University of Science and Technology, Faculty of Electrical Engineering, Automatics, Computer Science and Biomedical Engineering, Department of Power Electronics and Energy Control Systems, Cracow, Poland, EU, woznyk@agh.edu.pl
2 Pevin, Cracow, Poland, EU, pevin@pro.onet.pl
3 CBRTP SA Research and Development Center of Technology for Industry, Warsaw, Skylight Tower, Poland, EU, krzysztof.wozny@cbrtp.pl
4 AGH University of Science and Technology, Faculty of Computer Science, Electronics and Telecommunications, Department of Electronics, Cracow, Poland, EU marszale@agh.edu.pl
Conference:
25th Anniversary International Conference on Metallurgy and Materials, Hotel Voronez I, Brno, Czech Republic, EU, May 25th - 27th 2016
Proceedings:
Proceedings 25th Anniversary International Conference on Metallurgy and Materials
Pages:
1181-1186
ISBN:
978-80-87294-67-3
ISSN:
2694-9296
Published:
14th December 2016
Proceedings of the conference were published in Web of Science and Scopus.
Metrics:
85 views / 33 downloads
Abstract

The paper presents a system to optimize, control, visualization and data storage PVD processes. The system has been designed based on LabVIEW and has been successfully used in the optical industry. Visualization is very intuitive for the operator, provides an easy opportunity to control all process parameters. Saved data allow to create a library that allows to improve the quality of coatings and gives you the ability to analyze processes. The low cost of the introduction of the system also makes it a very useful tool for modifying older vacuum coaters and gives a chance to its gradual expansion. The collected libraries allow you to recreate and optimize the process of applying layers of materials.

Keywords: Process control system, library processes, LabVIEW graphical programming, antireflective coatings, thin films

© This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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